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ABSTRACT Chemical vapor deposition (CVD) growth of two-dimensional molybdenum disulfide (MoS 2 ) using molybdenum trioxide (MoO 3 ) and sulfur (S) powder often results in intermediate molybdenum oxy-sulfide (MoOS 2 ) species along with MoS 2 due to a lack of control over the vapor pressure required for the clean growth. Much effort has been devoted in understanding and controlling of these intermediate MoOS 2 specifies. Here, we show that with a second step sulfurization at moderate temperatures, these MoOS 2 crystals can be transformed to monolayer MoS 2 crystals. Scanning electron microscopy, Raman and photoluminescence spectroscopy and atomic force microscopy characterization carried out before and after re-sulfurization confirm the monolayer MoS 2 growth via this route. This study shows that MoOS 2 formed at the intermediate state can be successfully recycled to MoS 2 .more » « less
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